New Iridium Acid Strontium (SrIrO3) Sputtering Target View larger

Iridium Acid Strontium (SrIrO3) Sputtering Target

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HM provides high-quality SrIrO3 Sputtering Target at a competitive price, which can be used in Scientific research or industrial production.

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SrCO3 powder (99.99% purity) and IrO2 powder (99.99% purity) were weighted according to the SrIrO3 chemical formula and then milled for 8 hours. The mixtures were sintered at ~950 oC for 6 hours to get single-phase SrIrO3 powder and its XRD pattern is shown in Figure 1. The SrIrO3 powder was milled again and then pressed to a target. Such target was sintered at ~1200 oC under 1.5 MPa pressure to get the high-density SrIrO3 target (Figure 2). Since SrIrO3 is just stable at 900-1000 oC and Sr2IrO4 is more stable above 1100 oC, it is not excluded that tiny SrIrO3 component may decompose to Sr2IrO4 and IrO2/Ir in this SrIrO3 target. Single-phase SrIrO3 film can be prepared through sputtering such a target with an optimizing temperature and oxygen pressure. It is better to not use ultrasonic cleaning to clean such targets.

In fact, both SrIrO3 target and its films are easy to decompose in humid air or many liquids such as water. 

Single-phase SrIrO3 powder sintered at 950 oC for 6 hours

Figure 1. Single-phase SrIrO3 powder sintered at 950 oC for 6 hours, where black lines are standard diffraction peaks of SrIrO3. 

XRD pattern of SrIrO3 target

Figure 2. XRD pattern of SrIrO3 target, where red lines are standard diffraction peaks of SrIrO3. 

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