Elastomer Bonding View larger

Elastomer Bonding

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Elastomer is an alternative bonding method that touts a higher temperature capability over the indium bond. Elastomer bonds are recommended when customers are consistently melting indium bonds. The major advantages of Elastomer bonding are its low cure temperature (reducing internal bond stresses from thermal miss match) and high operation temperature (250 °C).

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Advantages of Elastomer bonding.

Low cure temperature

High operation temperature (250 °C)

Larger dimensions of sputtering target and backing plate

 

Specification of Elastomer bonding.

Maximum Operating Temperature (°C)

250 ° C

Thermal Conductivity (W/mK)

54

Coefficient of Thermal Expansion (K-1)

2.2 x 10-4

Electrical Resistivity (ohm-cm)

0.0476

Bond Coverage

>98%

Bond Line Thickness

0.010” – 0.025”

 

Some materials that require elastomer bonding are the following:

Aluminum Nitride Sputtering Target

Barium Strontium Titanate AKA BST (Ba0.5Sr0.5TiO3) Sputtering Target

Barium Titanate (BaTiO3) Sputtering Target

Bismuth (Bi) Sputtering Target

Cobalt Oxide (CoO) Sputtering Target

Indium (In) Sputtering Target

Lithium (Li) Sputtering Target

Lithium Orthophosphate (Li3PO4) Sputtering Target

Manganese (Mn) Sputtering Target

Selenium (Se) Sputtering Target

Strontium Titanate (SrTiO3) Sputtering Target

Tin Oxide (SnO2) Sputtering Target

 

Please chose the best bonding method for your sputtering targets.

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