This table gives coefficients in an equation for the vapor pressure of metallic elements in both the solid and liquid state. Vapor pressure in the range of 10-15 to 10-3-atmare covered.

Evaporation Data | Z-factor and density for Evaporation Materials - Heeger Materials Inc

Sputtering targets are used to create thin films in a technique known as sputter deposition or thin film deposition.

Pure tantalum - or maybe an alloy? Heeger Materials tell you.

Heeger Materials provide nitrides ceramic sputtering targets such as Silicon Nitride, Aluminum Nitride, Boron Nitride and so on.