Z-factor and density for Evaporation Materials
A. Material Parameters
In the table below, an * is used to indicate that the material’s Z Factor is not known. A method of determining Z Factor empirically follows the materials table.
Formula | Density | Z-Ratio | Material Name |
Ag | 10.500 | 0.529 | Silver |
AgBr | 6.470 | 1.180 | Silver Bromide |
AgCl | 5.560 | 1.320 | Silver Chloride |
Al | 2.700 | 1.080 | Aluminum |
Al2O3 | 3.970 | 0.336 | Aluminum Oxide |
Al4C3 | 2.360 | *1.000 | Aluminum Carbide |
AlF3 | 3.070 | *1.000 | Aluminum Fluoride |
AlN | 3.260 | *1.000 | Aluminum Nitride |
AlSb | 4.360 | 0.743 | Aluminum Antimonide |
As | 5.730 | 0.966 | Arsenic |
As2Se3 | 4.750 | *1.000 | Arsenic Selenide |
Au | 19.300 | 0.381 | Gold |
B | 2.370 | 0.389 | Boron |
B2O3 | 1.820 | *1.000 | Boron Oxide |
B4C | 2.370 | *1.000 | Boron Carbide |
BN | 1.860 | *1.000 | Boron Nitride |
Ba | 3.500 | 2.100 | Barium |
BaF2 | 4.886 | 0.793 | Barium Fluoride |
BaN2O6 | 3.244 | 1.261 | Barium Nitrate |
BaO | 5.720 | *1.000 | Barium Oxide |
BaTiO3 | 5.999 | 0.464 | Barium Titanate (Tetr) |
BaTiO3 | 6.035 | 0.412 | Barium Titanate (Cubic) |
Be | 1.850 | 0.543 | Beryllium |
BeF2 | 1.990 | *1.000 | Beryllium Fluoride |
BeO | 3.010 | *1.000 | Beryllium Oxide |
Bi | 9.800 | 0.790 | Bismuth |
Bi2O3 | 8.900 | *1.000 | Bismuth Oxide |
Bi2S3 | 7.390 | *1.000 | Bismuth Trisuiphide |
Bi2Se3 | 6.820 | *1.000 | Bismuth Selenide |
Bi2Te3 | 7.700 | *1.000 | Bismuth Telluride |
BiF3 | 5.320 | *1.000 | Bismuth Fluoride |
C | 2.250 | 3.260 | Carbon (Graphite) |
C | 3.520 | 0.220 | Carbon (Diamond) |
C8H8 | 1.100 | *1.000 | Parlyene (Union Carbide) |
FTC-2800 Operation Manual
Formula | Density | Z-Ratio | Material Name |
Ca | 1.550 | 2.620 | Calcium |
CaF2 | 3.180 | 0.775 | Calcium Fluoride |
CaO | 3.350 | *1.000 | Calcium Oxide |
CaO-SiO2 | 2.900 | *1.000 | Calcium Silicate (3) |
CaSO4 | 2.962 | 0.955 | Calcium Sulfate |
CaTiO3 | 4.100 | *10～ | Calcium Titanate |
CaWO4 | 6.060 | *1.000 | Calcium Tungstate |
Cd | 8.640 | 0.682 | Cadmium |
CdF2 | 6.640 | *1.000 | Cadmium Fluoride |
CdO | 8.150 | *1.000 | Cadmium Oxide |
CdS | 4.830 | 1.020 | Cadmium Sulfide |
CdSe | 5.810 | *1.000 | Cadmium Selenide, |
CdTe | 6.200 | 0.980 | Cadmium Telluride |
Ce | 6.780 | *1.000 | Cerium |
CeF3 | 6.160 | *1.000 | Cerium (III) Fluoride |
CeO2 | 7.130 | *1.000 | Cerium (IV) Dioxide |
Co | 8.900 | 0.343 | Cobalt |
CoO | 6.440 | 0.412 | Cobalt Oxide |
Cr | 7.200 | 0.305 | Chromium |
Cr2O3 | 5.210 | *1.000 | Chromium (III) Oxide |
Cr3C2 | 6.680 | *1.000 | Chromium Carbide |
CrB | 6.170 | *1.000 | Chromium Boride |
Cs | 1.870 | *1.000 | Cesium |
Cs2SO4 | 4.243 | 1.212 | Cesium Sulfate |
CsBr | 4.456 | 1.410 | Cesium Bromide |
CsCl | 3.988 | 1.399 | Cesium Chloride |
CsI | 4.516 | 1.542 | Cesium Iodide |
Cu | 8.930 | 0.437 | Copper |
Cu2O | 6.000 | *1.000 | Copper Oxide |
Cu2S | 5.600 | 0.690 | Copper (I) Sulfide (Alpha) |
Cu2S | 5.800 | 0.670 | Copper (I) Sulfide (Beta) |
CuS | 4.600 | 0.820 | Copper (II) Sulfide |
Dy | 8.550 | 0.600 | Dysprosium |
Dy2O3 | 7.810 | *1.000 | Dysprosium Oxide |
Er | 9.050 | 0.740 | Erbium |
Er2O3 | 8.640 | *1.000 | Erbium Oxide |
Eu | 5.260 | *1.000 | Europium |
EuF2 | 6.500 | *1 .000 | Europium Fluoride |
Operation Manual FTC-2800
Formula | Density | Z-Ratio | Material Name |
Fe | 7.860 | 0.349 | Iron |
Fe2O3 | 5.240 | *1.000 | Iron Oxide |
FeO | 5.700 | *1.000 | Iron Oxide |
FeS | 4.840 | *1.000 | Iron Sulphide |
Ga | 5.930 | 0.593 | Gallium |
Ga2O3 | 5.880 | *1.000 | Gallium Oxide (B) |
GaAs | 5.310 | 1.590 | Gallium Arsenide |
GaN | 6.100 | *1.000 | Gallium Nitride |
GaP | 4.100 | *1.000 | Gallium Phosphide |
GaSb | 5.600 | *1.000 | Gallium Antimonide |
Gd | 7.890 | 0.670 | Gadolinium |
Gd2O3 | 7.410 | *1.000 | Gadolinium Oxide |